文档名：一体化摩擦电自供能气湿传感器研究进展
摘要：气湿传感器在环境检测、工农业生产以及医疗健康等领域应用甚广,然而主流的电阻、电容、光电气湿传感器需要外部供能工作,一方面电池的频繁更换与维护增加了泄露引起的环境污染,另一方面传感器对外界能源过于依赖将限制其在缺乏能源的场合中正常工作.鉴于此,通过赋予气湿传感器自发收集外界环境能量并转化成电能的能力,以实现长期自主工作的自供能气湿传感器的理念应运而生.摩擦纳米发电机(TriboElectricNanoGenerator,TENG)作为一种新型能量俘获装置,由于其成本低、可结构设计且能量转换效率高等优势,在机械能收集与自供能传感器等领域应用广泛.进一步赋予TENG外界信息感知的能力,可实现单一器件兼具能量收集与气体敏感的功能,这种一体化摩擦电自供能传感器是目前传感器领域发展的一个热点方向.本文对一体化摩擦电自供能气湿传感器的研究现状与最新进展进行了综述,可从以下三个方面进行概括.(1)一体化摩擦电气湿传感器工作原理与气敏机理,并基于TENG的等效电路模型论述了影响敏感性能的参数—介电层摩擦电荷密度、介电层介电常数与电极层电导率;(2)一体化摩擦电气体传感器的研究进展,根据检测对象将其主要分为氨气(Ammonia,NH3)、乙醇以及其他有机挥发化合物(VolatileOrganicCompound,VOC)气体传感器,介绍了其在呼出气、食品变质以及尾气排放检测场合的应用;(3)一体化摩擦电湿度传感器的研究进展,根据湿度对输出电信号幅值影响的不同将其主要分为电信号下降型传感器与电信号上升型传感器,介绍了其在非接触开关、皮肤湿度与尿不湿检测场合的应用.最后对一体化摩擦电气湿传感器的研究现状与面临的问题挑战进行了总结,并对其未来的发展方向进行了展望,可为相关研究提供参考.
Abstract：Gasandhumiditysensorsarewidelyappliedinvariousfieldssuchasenvironmentaldetection,industrialandagriculturalproduction,andmedicalhealth.However,themainstreamreportedresistive,capacitive,andoptoelectricgas/humiditysensorsrequireexternalenergysupply,notonlycausingtheenvironmentpollutionfromthebatteryleakageaf-terfrequentlychangedandmaintained,butalsorestrictingthesensor'soperationundertheenergyshortagecircumstance.Asoneofthenovelenergyharvestingdevices,triboelectricnanogenerators(TENG)havebeenwidelyappliedinmechani-calenergyharvestingandself-poweredsensorsowingtothemeritsoflow-cost,designablestructure,andhighenergycon-versionefficiency.Furthermore,researchershaveendowedTENGwiththeabilityofacquiringinformationfromtheout-side,whichisexpectedtointegratetheenergycollectionandsensingunitintoonedevice.Theabove-mentionedintegratedtriboelectricself-poweredsensorisoneofthehottesttopicsinthesensingtechnique.Thisarticleprovidesareviewofthecurrentresearchstatusandlatestprogressofintegratedtriboelectricself-poweredgas/humiditysensors,whichcanbesum-marizedfromthefollowingthreeaspects.(1)Theworkingprincipleandgassensingmechanismofintegratedtriboelectricgas/humiditysensors.Meanwhile,parameters(triboelectricchargesdensityanddielectricconstantofdielectriclayer,con-ductivityofelectrodelayer)thataffectthesensingperformancesarediscussedbasedonTENG'sequivalentcircuitmodel.Triboelectricchargesdensitycanbeeffectivelyinfluencedbasedonthescreeningeffectofthecondensedthinfilmonthefrictionsurfaceortheelectronstransferbetweenthefrictionsurfaceandthegas/watermolecules,resultingintheincreased/decreasedequivalenttriboelectriccharges;Outputchangesbasedondielectricconstantofthedielectriclayer(alsothetribo-electriclayer)usuallyoccurinthesituationwherethereisasignificantdifferenceinthedielectricconstantbetweenthetestsampleandthedielectriclayer.However,thelimitedgas/wateradsorptioncauseslittlechangesindielectricconstant,result-inginthepoorsensingresponse;VariationsoftheoutputchangesofTENGbasedontheresistanceschangeofthesensingelectrodecanbeattributedtotheKirchhoffvoltagedividerlaw,wherethevoltagereceivedbyeachloadisdirectlypropor-tionaltoitsimpedanceinaseriescircuit.However,owingtothehighimpedanceoftheairlayeranddielectriclayers,signif-icantresistance/impedancechangesofsensingelectrodesduringsensingperiodaredemanded,restrictingthematerialselec-tion.(2)Theresearchprogressesofintegratedtriboelectricgassensors(TGS)aremainlydividedintoammonia(NH3),etha-nol,andothervolatileorganiccompound(VOC)gassensorsaccordingtothedetectionsubjects.Furthermore,theapplica-tionsofTGSindetectingexhaledgas,foodspoilage,andexhaustemissionsareintroduced.(3)Basedonthedifferentef-fectsofhumidityontheamplitudeofoutputelectricalsignals,theresearchprogressesofintegratedtriboelectrichumiditysensors(THS)aremainlydividedintothesensorswiththeperformancesofhumidityinducedsignaldropsandrises.Fur-thermore,theapplicationsofTHSinnon-contactswitches,skinhumidityanddiaperdetectionareintroduced.Finally,theresearchstatusandchallengesofTGSandTHSaresummarized.Meanwhile,theprospectsofthefuturedevelopmentareil-lustrated,providingreferencesforthefutureresearchofintegratedtriboelectricself-poweredgas/humiditysensors.
作者：刘勃豪 谢光忠 段再华 袁震 蒋亚东 太惠玲Author：LIUBo-hao XIEGuang-zhong DUANZai-hua YUANZhen JIANGYa-dong TAIHui-ling
作者单位：电子科技大学光电科学与工程学院,电子薄膜与集成器件国家重点实验室,四川成都611731
刊名：电子学报
Journal：ActaElectronicaSinica
年，卷(期)：2024, 52(2)
分类号：TM619TP212
关键词：摩擦纳米发电机 一体化 自供能 敏感机理 气体传感器 湿度传感器
Keywords：triboelectricnanogenerator integrated self-powered sensingmechanism gassensor humiditysensor
机标分类号：TP212TN929.5O
在线出版日期：2024年4月19日
基金项目：一体化摩擦电自供能气湿传感器研究进展[
期刊论文] 电子学报--2024, 52(2)刘勃豪 谢光忠 段再华 袁震 蒋亚东 太惠玲气湿传感器在环境检测、工农业生产以及医疗健康等领域应用甚广,然而主流的电阻、电容、光电气湿传感器需要外部供能工作,一方面电池的频繁更换与维护增加了泄露引起的环境污染,另一方面传感器对外界能源过于依赖将限制其在...参考文献和引证文献
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一体化摩擦电自供能气湿传感器研究进展 Research Progress on Integrated Triboelectric Self-Powered Gas and Humidity Sensors
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