文档摘要：为制备高性能日盲紫外光电探测器,采用低温金属有机物化学气相沉积方法制备了非晶氧化镓薄膜.通过对薄膜结构特性测试证明了薄膜的非晶特性,并且薄膜表面较为平坦,光学吸收边位于深紫外波段范围内.在此基础上,研制了日盲紫外光电探测器.随非晶氧化镓感光层厚度由33.2nm增至133.6nm,探测器的光电流和暗电流均提升了2个数量级,并且响应度和外量子效率均随感光层厚度提升而增大,探测器的响应度和外量子效率的最大值分别达到2.91A/W和1419.12％.探测器的厚度依赖特性可归因于界面高缺陷层、光吸收强度以及探测器的几何参数.此外,探测器展现出良好的波长选择性以及时间分辨响应稳定性.
Abstract：Duetoitslowbackgroundnoise,solar-blindultravioletphotodetectiontechnologyiswidelyusedinfieldssuchasfiremonitoring,missiledetection,andmilitarycommunication.Comparedtoothersolar-blindultravioletsensitivematerials,amorphousgalliumoxideoffersseveraladvantages,includingabandgapthatmatchesthesolar-blindultravioletregion,structuralstability,andgoodmechanicalstrength.Thehorizontalmetal-semiconductor-metalstructuredphotodetectorsareknownfortheirsimpleproductionprocesses,easeofintegration,andsuitabilityforindustrialization.Giventhenon-uniformdistributionoftheinternalelectricfieldandthephoto-generatedcarriersalongthethicknessdirectioninhorizontaldevices,thethicknessofthephotoreceptivelayerplaysacrucialroleintheperformanceofthephotodetectors.Inordertofabricatehigh-performancesolar-blindultravioletphotodetectors,amorphousgalliumoxidethinfilmswerepreparedusinglow-temperaturemetalorganicchemicalvapordepositionmethod.Structuralcharacterizationofthefilmsconfirmedtheiramorphousnature,andthefilmsurfaceswerefoundtoberelativelyflat,withtheopticalabsorptionedgelocatedwithinthedeepultravioletspectralrange.Solar-blindultravioletphotodetectorsweresubsequentlydeveloped.Asthethicknessofthephotoreceptivelayerincreasedfrom33.2nmto133.6nm,thedark-currentofthephotodetectorrosefrom2.33×10-10Ato2.12×10-8A,andthephoto-currentunder254nmilluminationincreasedfrom1.66×10-7Ato3.2×10-5A.Additionally,boththeresponsivityandtheexternalquantumefficiencyofthephotodetectorsincreasedbyordersofmagnitudewiththeincreaseinthephotoreceptivelayerthickness,reachingmaximumvaluesof2.91A/Wand1419.12％,respectively.Thethickness-dependentcharacteristicsofthephotodetectorscanbeattributedtotheinterfacialhigh-defectlayers,lightabsorptionintensity,andthegeometricparametersofthephotodetectors.Thephotodetectorsexhibitedexcellentwavelengthselectivity,thecurrentofeachphoto-detectorunder365nmilluminationandthephoto-currentunder254nmilluminationdifferbymorethantwoordersofmagnitude.Moreover,overthetested5cycles,theresponse/recoverybehaviorofeachphotodetectorconsistentlydemonstratesgoodrepeatabilityandstability.
作者：常鼎钧 李赜明 张赫之 Author：CHANGDingjun LIZeming ZHANGHezhi
作者单位：中国地质大学(北京)地球物理与信息技术学院,北京100028大连理工大学集成电路学院,辽宁大连116024
刊名：吉林大学学报（信息科学版） ISTIC
Journal：JournalofJilinUniversity(InformationScienceEdition)
年，卷(期)：2024, 42(3)
分类号：TN303
关键词：非晶氧化镓 日盲紫外探测 厚度依赖特性 金属有机物化学气相沉积
Keywords：amorphousgalliumoxide solar-blindultravioletdetection thickness-dependentproperties metalorganicchemicalvapordeposition
机标分类号：TN304.055O484.1TN215
在线出版日期：2024年7月19日
基金项目：国家自然科学基金感光层厚度对a-GaOx基日盲紫外光电探测器的性能影响研究[
期刊论文] 吉林大学学报（信息科学版）--2024, 42(3)常鼎钧 李赜明 张赫之为制备高性能日盲紫外光电探测器,采用低温金属有机物化学气相沉积方法制备了非晶氧化镓薄膜.通过对薄膜结构特性测试证明了薄膜的非晶特性,并且薄膜表面较为平坦,光学吸收边位于深紫外波段范围内.在此基础上,研制了日盲...参考文献和引证文献
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关键词：非晶氧化镓,日盲紫外探测,厚度依赖特性,金属有机物化学气相沉积,
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